RECIPE MANAGEMENT DEVICE

• Main Authors: TSUJISAWA KENICHI, MORINAGA HIROYUKI
• Format: Patent
• Language: English
• Published: 06.03.2014
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a recipe management device capable of determining whether a recipe is valid by comparing a plurality of recipes by a simple method as compared with conventional ones in a semiconductor manufacturing system in which a plurality of processing devices of the same kind perform processing according to a recipe.SOLUTION: According to an embodiment, a recipe management device 20 is a device which compares a recipe specifying processing conditions of a processing device between a plurality of processing devices of the same kind, and comprises a recipe reading unit 21, a mask unit 24, and a determination unit 25. The recipe reading unit 21 reads binary-format recipes of the plurality of processing devices. The mask unit 24 masks recipe data on the basis of mask position information specifying the positions to be masked in binary-format data of the recipes. The determination unit 25 compares a plurality of masked recipes and determines whether there is a difference between the recipes.