CHARGED PARTICLE BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a charged particle beam device including a parameter adjustment training function for easily learning of a manual adjustment technique.SOLUTION: A charged particle beam device includes a display unit that sets a focus condition of an objective lens and a control cond...

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Bibliographic Details
Main Authors NODA HIROYUKI, TOMITA SHINICHI, SATO MITSUGU, NISHIMURA MASAKO, IIIZUMI NORIKO, TAMOCHI RYUICHIRO, KOI ASAMI, SHIGEFUJI NORIYUKI, WATANABE TOSHIYA
Format Patent
LanguageEnglish
Published 06.03.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide a charged particle beam device including a parameter adjustment training function for easily learning of a manual adjustment technique.SOLUTION: A charged particle beam device includes a display unit that sets a focus condition of an objective lens and a control condition of an X-direction non-point corrector and a Y-direction non-point corrector according to operation of a user, and reads out images for training corresponding to a set of conditions that has been set from a storage device and displays the images on a screen; and an evaluation unit that evaluates deviation between the conditions set by the operation of the user and a predetermined optimal values. The images for training are selected depending on difficulty of adjustment.
Bibliography:Application Number: JP20130219733