METHOD FOR SEALING GAS

PROBLEM TO BE SOLVED: To provide a method for sealing a gas, which maintains airtightness to a high degree at the fitting part between the insertion part and the support part of a segmented reaction vessel for use in manufacturing device of a polycrystalline silicon.SOLUTION: The method for sealing...

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Bibliographic Details
Main Authors ARAKANE TAKAYUKI, IWATA YOSHIKI, HONDA SHIYUUICHI, FUCHIGAMI TOSHIMITSU, YOKOZAKI KAZUSHI
Format Patent
LanguageEnglish
Published 06.03.2014
Subjects
BLASTING
CHEMISTRY
COMPOUNDS THEREOF
CYLINDERS
ENGINEERING ELEMENTS AND UNITS
GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS
HEATING
INORGANIC CHEMISTRY
LIGHTING
MECHANICAL ENGINEERING
METALLURGY
NON-METALLIC ELEMENTS
PISTONS
SEALINGS
THERMAL INSULATION IN GENERAL
WEAPONS
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Summary:PROBLEM TO BE SOLVED: To provide a method for sealing a gas, which maintains airtightness to a high degree at the fitting part between the insertion part and the support part of a segmented reaction vessel for use in manufacturing device of a polycrystalline silicon.SOLUTION: The method for sealing a gas at the fitting part between the insertion part and the support part of a segmented reaction vessel for use in manufacturing device of a polycrystalline silicon includes at least the step of arranging a string-like gas sealing material in a groove formed at the fitting part. The gas sealing material is formed by treating a metal wire reinforced braid of ceramic fiber with inorganic filler and/or organic filler.
Bibliography:Application Number: JP20120183281