FOCUSED ION BEAM DEVICE

PROBLEM TO BE SOLVED: To provide a liquid metal ion source having stability and a long life due to a small radiation angle of an ion beam achieved by operation in low emission, and to provide a focused ion beam device mounted with the liquid metal ion source.SOLUTION: A liquid metal ion source inclu...

Full description

Saved in:
Bibliographic Details
Main Authors KUBO TAKEHIRO, MADOKORO YUICHI
Format Patent
LanguageEnglish
Published 20.02.2014
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
Online AccessGet full text

Cover

More Information
Summary:PROBLEM TO BE SOLVED: To provide a liquid metal ion source having stability and a long life due to a small radiation angle of an ion beam achieved by operation in low emission, and to provide a focused ion beam device mounted with the liquid metal ion source.SOLUTION: A liquid metal ion source includes an emitter 101, an extraction electrode 408, and an acceleration electrode 401. The emitter 101 is supported by a piezo actuator 403 and its drive mechanism 404 via an insulator 402. The emitter 101 is positioned immediately near the extraction electrode 408.
Bibliography:Application Number: JP20120172479