FABRY-PEROT INTERFEROMETER

PROBLEM TO BE SOLVED: To provide a Fabry-Perot interferometer which includes a mirror having an air layer and is suitable for detection of components whose absorption wavelength is present in a mid-infrared region.SOLUTION: A pair of mirror structures (30, 50), opposed to each other with a gap (AG)...

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Bibliographic Details
Main Authors TAKEUCHI YUKIHIRO, YAMASHITA SHUICHI, TANEMURA TOMOKI, WADO HIROYUKI
Format Patent
LanguageEnglish
Published 09.01.2014
Subjects
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To provide a Fabry-Perot interferometer which includes a mirror having an air layer and is suitable for detection of components whose absorption wavelength is present in a mid-infrared region.SOLUTION: A pair of mirror structures (30, 50), opposed to each other with a gap (AG) in between, respectively has a pair of high refractive index layers (31,32,51,52) which are arranged in a laminated manner, and an air layer (33,53) which is a low refractive index layer interposed locally between the high refractive index layers. At least one of bridging sections (34,54) for bridging the gap is a membrane (MEM1,MEM2) which can be displaced, and each of the bridging sections has transmission sections (S1, S2) composed of at least one mirror (M1, M2) with a low refractive index layer interposed locally between the high refractive index layers, and peripheral sections (T1, T2) located around the transmission sections. All the mirrors at least on the incident side are diffraction suppressing mirrors which are more than seven times as wide as the upper limit of the transmission wavelength region.
Bibliography:Application Number: JP20120137237