METHOD AND APPARATUS FOR PRODUCING TARGET UNIT

• Main Authors: FUKUI SHIGEO, MURAKI MIKI, MASUDA TADASHI
• Format: Patent
• Language: English
• Published: 19.12.2013
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing a target unit capable of improving the quality and productivity of a target material.SOLUTION: A method for producing a target unit 100 includes a step of immersing a surface 10A of a substrate 10 in molten metal T1 of a target material T. A target solidified layer T2 is formed on the surface 10A by relatively moving the substrate 10 relative to the molten metal T1 while cooling the surface 10A. The substrate 10 is pulled up from the molten metal T1.