ALUMINA SINTERED BODY, MEMBER INCLUDING THE SAME, AND SEMICONDUCTOR MANUFACTURING APPARATUS

• Main Authors: TSUJI MASAKI, SAWAMURA TAKENORI, TOSA AKIBUMI, ITO YOICHI
• Format: Patent
• Language: English
• Published: 05.12.2013
• Subjects: ARTIFICIAL STONE; BASIC ELECTRIC ELEMENTS; CABLES; CEMENTS; CERAMICS; CHEMISTRY; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS; CONCRETE; CONDUCTORS; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; INSULATORS; LIME, MAGNESIA; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; PERFORMING OPERATIONS; REFRACTORIES; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES; SEMICONDUCTOR DEVICES; SLAG; TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION; TECHNICAL SUBJECTS COVERED BY FORMER USPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS; TRANSPORTING; TREATMENT OF NATURAL STONE

PROBLEM TO BE SOLVED: To provide an alumina sintered body that exhibits desired volume resistivity while suppressing complications of a manufacturing process and the amount of a titanium oxide that is added to alumina.SOLUTION: An alumina sintered body includes alumina as a main component and titanium, further includes at least one element selected from the group consisting of lanthanum, neodymium and cerium. Aluminum is contained in the alumina sintered body in an amount such that the ratio of an aluminum oxide to total oxides in the alumina sintered body becomes 93.00 to 99.85 wt.% where the total oxides are defined as a total amount of all oxides contained in the alumina sintered body. Titanium is contained in an amount such that the ratio of titanium oxide to the total oxides becomes 0.10 to 2.00 wt.%. Lanthanum, neodymium and cerium are contained in a combined amount such that the ratio of the combination amount to the total amount of oxides becomes 0.05 to 5.00 wt.%. The volume resistivity is 1×10to 1×10 cm at room temperature.