DISPLAY DEVICE, ARRAY SUBSTRATE, THIN FILM TRANSISTOR, AND MANUFACTURING METHOD THEREOF

PROBLEM TO BE SOLVED: To provide a display device, an array substrate, a thin film transistor, and a manufacturing method thereof.SOLUTION: The thin film transistor comprises a gate, an active layer, and a gate insulating layer disposed between the gate and the active layer. The active layer is of a...

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Bibliographic Details
Main Authors YUAN GUANGCAI, LEE WOO BONG
Format Patent
LanguageEnglish
Published 14.11.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a display device, an array substrate, a thin film transistor, and a manufacturing method thereof.SOLUTION: The thin film transistor comprises a gate, an active layer, and a gate insulating layer disposed between the gate and the active layer. The active layer is of an oxide semiconductor, and the gate insulating layer comprises at least one inorganic insulating thin film. The gate insulating layer of the thin film transistor can effectively avoid an effect of hydrogen groups on the oxide semiconductor, maximize stability of the whole TFT device, and increase an acceptance rate of products.
Bibliography:Application Number: JP20120227751