METHOD FOR ENCAPSULATING ENCAPSULATION LIQUID OF DIFFERENTIAL PRESSURE SENSOR

PROBLEM TO BE SOLVED: To eliminate a zero point adjustment mechanism of a differential pressure sensor, to eliminate necessity to adjust a zero point as an independent process after completion of assembly of the differential pressure sensor, and to guarantee long term stability of zero point adjustm...

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Bibliographic Details
Main Author TAKAI MUNENORI
Format Patent
LanguageEnglish
Published 12.09.2013
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Summary:PROBLEM TO BE SOLVED: To eliminate a zero point adjustment mechanism of a differential pressure sensor, to eliminate necessity to adjust a zero point as an independent process after completion of assembly of the differential pressure sensor, and to guarantee long term stability of zero point adjustment.SOLUTION: Encapsulation chambers 6-1 and 6-2 are made into vacuum, a medium 5-1 for transmitting pressure is encapsulated in the encapsulation chamber 6-1, and a medium 5-2 for transmitting pressure is encapsulated in the encapsulation chamber 6-2. Then, the medium 5-2 for transmitting the pressure is sealed in the encapsulation chamber 6-2, a signal P to be output from a sensor diaphragm 3-1 is monitored while performing pressure encapsulation of the medium 5-1 for transmitting the pressure, when it is confirmed that the signal P reaches a setting value which is preset as a zero point output value, the pressure encapsulation of the medium 5-1 for transmitting the pressure is terminated, and the medium 5-1 for transmitting the pressure is sealed in the encapsulation chamber 6-1.
Bibliography:Application Number: JP20120047823