MEMS ELEMENT AND METHOD FOR MANUFACTURING MEMS ELEMENT

• Main Authors: SAKA SOTARO, KOIWA YUKIO, SATO HIROAKI
• Format: Patent
• Language: English
• Published: 12.09.2013
• Subjects: INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES; MICROSTRUCTURAL TECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS; TESTING; TRANSPORTING

PROBLEM TO BE SOLVED: To suppress a movable part of an MEMS element from sticking to a cap structure.SOLUTION: A method for manufacturing an MEMS element is provided as an embodiment of the present invention, which comprises: disposing a photosensitive resin material on a first substrate; exposing the photosensitive resin material for patterning to form a bonding part and a protruding part comprising the photosensitive resin material on the first substrate; preparing a second substrate on which an MEMS main element including a movable part is fabricated; allowing the protruding part to oppose to the movable part; and bonding the first substrate to the second substrate by the bonding part.