MASS SPECTROSCOPE AND USAGE THEREOF, AND GAS PERMEATION CHARACTERISTIC MEASURING METHOD

PROBLEM TO BE SOLVED: To detect an extremely small amount of contents included in a gas to be measured.SOLUTION: A mass spectroscope 1 includes an ionization section 2 having a gas introduction port 2a through which a gas to be measured and a cleaning gas are alternated and introduced and a gas exha...

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Bibliographic Details
Main Author MIZOGAMI KAZUAKI
Format Patent
LanguageEnglish
Published 05.09.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To detect an extremely small amount of contents included in a gas to be measured.SOLUTION: A mass spectroscope 1 includes an ionization section 2 having a gas introduction port 2a through which a gas to be measured and a cleaning gas are alternated and introduced and a gas exhaust port 2b for exhausting the gases introduced through the gas introduction port 2a, a mass spectrometry section 4 which analyzes ions generated by the ionization section 2, ionization section heating means 12 of heating the ionization section 2, and ionization section cooling means 13 of forcibly cooling the ionization section 2.
Bibliography:Application Number: JP20120038194