METHOD FOR MANUFACTURING BACK-ELECTRODE-TYPE SOLAR CELL AND SPIN COATER

• Main Authors: HASHIMOTO TAKAHIRO, AKADA HIROYUKI, YOKOZAWA YUJI
• Format: Patent
• Language: English
• Published: 15.08.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a method for manufacturing a back-electrode-type solar cell capable of improving appearance of a light-receiving surface by suppressing pattern occurrence on the light-receiving surface, and a spin coater used for such a manufacturing method.SOLUTION: A method for manufacturing a back-electrode-type solar cell comprises the steps of: supplying a solution to a light-receiving surface 61 of a silicon substrate 4; applying the solution to the light-receiving surface 61 of the silicon substrate 4 and drying the solution by rotating the silicon substrate 4; and simultaneously forming a light-receiving surface diffusion layer and an antireflection film on the light-receiving surface 61 of the silicon substrate 4 by heat treatment after the step of applying the solution to the light-receiving surface 61 of the silicon substrate 4 and drying the solution. The step of applying the solution to the light-receiving surface 61 of the silicon substrate 4 and drying the solution includes a step of blowing a gas to an outer periphery 66 of light-receiving surface 61 of the silicon substrate 4.