TOUCH PANEL WIRING STRUCTURE
PROBLEM TO BE SOLVED: To provide a touch panel wiring structure in which, when an insulating coat on a wiring pattern is subjected to dry etching to form a through hole, the wiring pattern and a connection pattern are reliably electrically connected in the through hole.SOLUTION: A metal oxide thin f...
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Main Authors | , , |
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Format | Patent |
Language | English |
Published |
25.07.2013
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Subjects | |
Online Access | Get full text |
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Summary: | PROBLEM TO BE SOLVED: To provide a touch panel wiring structure in which, when an insulating coat on a wiring pattern is subjected to dry etching to form a through hole, the wiring pattern and a connection pattern are reliably electrically connected in the through hole.SOLUTION: A metal oxide thin film layer is put on at least part of a metal wiring pattern to form a wiring pattern, and the metal oxide thin film layer faces the inner bottom surface of a through hole, so as to prevent the metal wiring pattern from being oxidized and deteriorated in a process of dry etching. |
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Bibliography: | Application Number: JP20120005913 |