METHOD OF MANUFACTURING PIEZOELECTRIC OSCILLATOR

PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric oscillator capable of minimizing frequency variation.SOLUTION: A piezoelectric oscillating piece 10, which comprises an oscillating arm 16 and in which a metal film 34 and an exciting electrode film are formed in the oscillat...

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Bibliographic Details
Main Author ENDO HIDEO
Format Patent
LanguageEnglish
Published 13.06.2013
Subjects
BASIC ELECTRONIC CIRCUITRY
ELECTRICITY
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS
RESONATORS
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Summary:PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric oscillator capable of minimizing frequency variation.SOLUTION: A piezoelectric oscillating piece 10, which comprises an oscillating arm 16 and in which a metal film 34 and an exciting electrode film are formed in the oscillating arm 16, is prepared. By forming ruggedness on the metal film 34 by using a laser beam, a surface area of the metal film 34 is enlarged. The piezoelectric oscillating piece 10 is mounted in a package 40 thereafter. The metal film 34 is etched by an ion beam thereafter. Internal space of the package 40 is air-tightly sealed thereafter.
Bibliography:Application Number: JP20120285331