AC DRIVE ELECTROSTATIC CHUCK

• Main Authors: YOSHII YUICHI, ISHIKAWA KAZUKO, ANADA KAZUTERU, YONEZAWA JUNJI
• Format: Patent
• Language: English
• Published: 09.05.2013
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide an AC drive electrostatic chuck capable of preventing projections provided on a mounting surface side from being partially and locally damaged.SOLUTION: An AC drive electrostatic chuck includes: a dielectric substrate having projections formed on a principal surface on a side for mounting an object to be sucked, and a bottom surface formed around the projections; and electrodes provided in the dielectric substrate. The electrodes each include a plurality of electrode elements arranged so as to be spaced from each other, and AC voltages different in phase from each other can be applied to the plurality of electrode elements, respectively. The projections are arranged on the principal surface at predetermined intervals corresponding to a shape of the plurality of electrode elements.