RADIATION SOURCE

• Main Authors: LABETSKI DZMITRY, SCHIMMEL HENDRIKUS GIJSBERTUS, DIJKSMAN JOHAN FREDERIK
• Format: Patent
• Language: English
• Published: 18.04.2013
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES; X-RAY TECHNIQUE

PROBLEM TO BE SOLVED: To provide a radiation source having a nozzle through which a fuel can pass without encountering an unexpected or unintended trouble or limitation.SOLUTION: The radiation source includes a reservoir, a nozzle, a laser and a positive lens. The reservoir is configured to hold the volume of a fuel. The nozzle in fluid connection with the reservoir is configured to guide the flow of fuel toward a plasma formation position along a track. The laser is configured to guide the laser radiation to the flow at the plasma formation position, and to generate radiation-generating plasma during use. The positive lens configuration is configured so as to focus at least the potential spread of the track of fuel flow toward the plasma formation position, and the lens includes an electric field generation element and/or a magnetic field generation element.