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PROBLEM TO BE SOLVED: To provide the size of defects more accurately than the prior art by taking into account a state of a sensor which detects light from a substrate.SOLUTION: In a sensor which detects light from a substrate, a part is selected which is suitable to obtain the size of defects, and...

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Bibliographic Details
Main Author OTANI SEIJI
Format Patent
LanguageEnglish
Published 04.03.2013
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide the size of defects more accurately than the prior art by taking into account a state of a sensor which detects light from a substrate.SOLUTION: In a sensor which detects light from a substrate, a part is selected which is suitable to obtain the size of defects, and the substrate is moved in accordance with the suitable part.
Bibliography:Application Number: JP20110181119