SPIN-ON-DIELECTRIC COMPOSITION WITH COATING ENHANCER
PROBLEM TO BE SOLVED: To provide spin-on-dielectric formulations that have a broader processing window and limited or non-observable striations with only very low levels of polymeric coating additives.SOLUTION: This invention is a composition comprising (a) an oligomer or polymer dispersible in an o...
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Main Authors | , , , , , |
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Format | Patent |
Language | English |
Published |
28.02.2013
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Subjects | |
Online Access | Get full text |
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