SPIN-ON-DIELECTRIC COMPOSITION WITH COATING ENHANCER
PROBLEM TO BE SOLVED: To provide spin-on-dielectric formulations that have a broader processing window and limited or non-observable striations with only very low levels of polymeric coating additives.SOLUTION: This invention is a composition comprising (a) an oligomer or polymer dispersible in an o...
Saved in:
Main Authors | , , , , , |
---|---|
Format | Patent |
Language | English |
Published |
28.02.2013
|
Subjects | |
Online Access | Get full text |
Cover
Loading…
Summary: | PROBLEM TO BE SOLVED: To provide spin-on-dielectric formulations that have a broader processing window and limited or non-observable striations with only very low levels of polymeric coating additives.SOLUTION: This invention is a composition comprising (a) an oligomer or polymer dispersible in an organic solvent, having a low dielectric constant, or being curable to form a material having a low dielectric constant, (b) at least one organic solvent and (c) less than 1,000 ppm of a polymeric coating additive based on the total weight of composition. The polymeric additive is characterized in that it is miscible with component (a) and the solvent system but becomes incompatible with the mixture of component (a) and solvent during the coating process. |
---|---|
Bibliography: | Application Number: JP20120236642 |