LOCALIZED TYPE SURFACE PLASMON RESONANCE SENSOR UNIT AND MANUFACTURING METHOD FOR THE SAME

• Main Authors: MATSUMURA YASUSHI, ENOMOTO YASUSHI
• Format: Patent
• Language: English
• Published: 21.02.2013
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MEASURING; NANOTECHNOLOGY; PERFORMING OPERATIONS; PHYSICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; TESTING; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

PROBLEM TO BE SOLVED: To provide, by utilizing an imprint technique, a localized type surface plasmon resonance device having a highly accurate convexo-concave pattern free from limitation of the type of resin to be used.SOLUTION: A manufacturing method for localized type surface plasmon resonance sensor units includes the steps of: I) forming a resin layer having a shape-transferred face, to which a convexo-concave shape is transferred, by coating a casting mold having the convexo-concave shape with resin solution and drying the coat; II) impregnating the resin layer with metallic ions by bringing the resin layer into contact with metallic ion containing solution; III) forming a metal-separated layer by reducing the metallic ions and separating the metal on the surface of the resin layer including the shape-transferred face; IV) forming a metal-plated layer by applying non-electrolytic plating and/or electric plating over the metal-separated layer; and V) forming a metallic film having the convexo-concave shape that generates localized type surface plasmon resonance by removing the resin layer after the step IV.