METHOD FOR CREATING S/TEM SAMPLE AND SAMPLE STRUCTURE

PROBLEM TO BE SOLVED: To provide an improved method and apparatus for S/TEM sample preparation and analysis.SOLUTION: Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (under 100 nm in thick) TEM lamellae. Preferred embodim...

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Bibliographic Details
Main Authors MAXIMUS THEODORUS OTTEN, JASON ARJAVAC, PEI ZOU, DAVID JAMES TASKER, GERHARD DANIEL
Format Patent
LanguageEnglish
Published 14.02.2013
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide an improved method and apparatus for S/TEM sample preparation and analysis.SOLUTION: Preferred embodiments of the present invention provide improved methods for TEM sample creation, especially for small geometry (under 100 nm in thick) TEM lamellae. Preferred embodiments of the present invention also provide methods to partially or fully automate TEM sample creation, to make the process of creating and analyzing TEM samples less labor intensive, and to increase throughput and reproducibility of TEM analysis, thereby providing in-line process for S/TEM based metrology on objects such as integrated circuits or other structures manufactured on semiconductor wafer.
Bibliography:Application Number: JP20120248393