METHOD FOR MEASURING MEASURED OBJECT

PROBLEM TO BE SOLVED: To provide a measurement method capable of measuring the measured object having cohesiveness with high sensitivity.SOLUTION: In a measurement method, the measured object having cohesiveness is retained on at least one main surface of a gap arrangement structure made of metal an...

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Bibliographic Details
Main Authors TANAKA KOJI, KAMINAMI SEIJI, KONDO TAKASHI, TAKIGAWA KAZUHIRO
Format Patent
LanguageEnglish
Published 04.02.2013
Subjects
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