METHOD FOR MEASURING MEASURED OBJECT
PROBLEM TO BE SOLVED: To provide a measurement method capable of measuring the measured object having cohesiveness with high sensitivity.SOLUTION: In a measurement method, the measured object having cohesiveness is retained on at least one main surface of a gap arrangement structure made of metal an...
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Main Authors | , , , |
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Format | Patent |
Language | English |
Published |
04.02.2013
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Subjects | |
Online Access | Get full text |
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