METHOD FOR MEASURING MEASURED OBJECT

PROBLEM TO BE SOLVED: To provide a measurement method capable of measuring the measured object having cohesiveness with high sensitivity.SOLUTION: In a measurement method, the measured object having cohesiveness is retained on at least one main surface of a gap arrangement structure made of metal an...

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Bibliographic Details
Main Authors TANAKA KOJI, KAMINAMI SEIJI, KONDO TAKASHI, TAKIGAWA KAZUHIRO
Format Patent
LanguageEnglish
Published 04.02.2013
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Summary:PROBLEM TO BE SOLVED: To provide a measurement method capable of measuring the measured object having cohesiveness with high sensitivity.SOLUTION: In a measurement method, the measured object having cohesiveness is retained on at least one main surface of a gap arrangement structure made of metal and formed by regularly arranging a plurality of gap parts in at least one arrangement direction, the gap arrangement structure is irradiated with electromagnetic waves from one main surface side, the electromagnetic waves passing through the gap arrangement structure or the electromagnetic waves reflected by the gap arrangement structure are detected, and the substance quantity of the measured object is measured from frequency characteristics of the detected electromagnetic waves.
Bibliography:Application Number: JP20110157846