PARTICLE COUNTING APPARATUS

• Main Author: ITO YOSHINAO
• Format: Patent
• Language: English
• Published: 24.01.2013
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

PROBLEM TO BE SOLVED: To provide a particle counting apparatus which is capable of accurately measuring the number of generated particles.SOLUTION: A particle counting apparatus is configured to count the number of particles passing through a predetermined measurement area in an exhaust duct of a vacuum device 1. The particle counting apparatus comprises a main body part 10 having individual identification information and including a laser light source 12 for irradiating the measurement area with laser light, a controller 20 including a light detection section 25 which detects light that is generated when the measurement area is irradiated with laser light, a calculation section 26 which calculates the size or the number of particles in the measurement target area from a detection signal of the light detection section and a driving device 21 of the laser light source 12, a wire cable 31, having individual identification information, for connecting the main body part 10 and the controller 20, and determination means which is provided in the controller 20 and determines whether or not the main body part 10, the controller 20 and the wire cable 31 form a regular combination by referring to the individual identification information of the main body part 10 and the individual identification information of the wire cable 31 when the main body part 10 and the controller 20 are connected by the wire cable 31.