TEMPERATURE SENSING PROBE, BURL PLATE, LITHOGRAPHIC APPARATUS AND METHOD

• Main Authors: SANDER CATHARINA REINIER DERKS, KUSTERS GERARDUS ADRIANUS ANTONIUS MARIA, LAURENT THIBAUD SIMON MATTHEW, KUNEN JOHANN GERTRUDIX CORNELIS
• Format: Patent
• Language: English
• Published: 27.12.2012
• Subjects: APPARATUS SPECIALLY ADAPTED THEREFOR; BASIC ELECTRIC ELEMENTS; CINEMATOGRAPHY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; ELECTROGRAPHY; HOLOGRAPHY; MATERIALS THEREFOR; MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; ORIGINALS THEREFOR; PHOTOGRAPHY; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES; PHYSICS; SEMICONDUCTOR DEVICES; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

PROBLEM TO BE SOLVED: To provide a temperature sensing probe which facilitates control of heaters and can be used in circumstances where a temperature gradient exists, in order to prevent imaging errors, in particular overlay errors, caused by thermal expansion and/or contraction due to an evaporational heat load on a substrate and/or a substrate table, which comes into contact with immersion liquid in an immersion lithographic apparatus.SOLUTION: One or more heaters 400 are formed in a burl plate supporting a substrate. A temperature sensing probe 500 can sense average temperature for two parts 610, 620. The temperature sensing probe includes a temperature sensor in an elongate housing. The elongate housing is elongate in a first direction and made of a material which has a thermal conductivity of at least 500 W/mK at 20°C in at least one direction.