METHOD OF MANUFACTURING PIEZOELECTRIC VIBRATOR, PIEZOELECTRIC VIBRATOR PRODUCED BY THE MANUFACTURING METHOD, AND OSCILLATOR, ELECTRONIC APPARATUS AND ELECTRIC WAVE CLOCK HAVING THE PIEZOELECTRIC VIBRATOR

• Main Author: FUNABIKI YOICHI
• Format: Patent
• Language: English
• Published: 25.10.2012
• Subjects: BASIC ELECTRIC ELEMENTS; BASIC ELECTRONIC CIRCUITRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION OF NOISE BY SUCH CIRCUITS; GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To decrease the value of bonding width L of a base substrate and a lid substrate of each piezoelectric vibrator.SOLUTION: A plurality of base substrates 2 each of which includes two through electrodes 7 are formed on a base substrate wafer 40, and a piezoelectric element piece 4 is mounted on each base substrate 2. Further, a plurality of lid substrates 3 each including a recess 3a are formed on a lid substrate wafer 50 to form a bonding film 35. By making the base substrate wafer 40 abut the lid substrate wafer 50 and performing anodic bonding to the wafers, a wafer body 60 that includes a plurality of piezoelectric vibrators 1 is fabricated. After that, by irradiating l the lid substrate wafer 50 side with laser light along the cutting line of each piezoelectric vibrator 1 to create a cut line, and pressing the wafer body by a sharp pressing blade 830 from the opposite side, the wafer body is sequentially cut. A cut surface can be clearly divided by pressing the cut line by the laser from the opposite side in this manner.