DEVICE AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

PROBLEM TO BE SOLVED: To improve conversion efficiency in generating extreme ultraviolet light.SOLUTION: A method for generating extreme ultraviolet light includes: a step (a) of supplying a target material into a chamber; and a step (b) of irradiating the target material with a laser beam to genera...

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Bibliographic Details
Main Authors WAKABAYASHI OSAMU, NISHIHARA ISANAGA, SUNAHARA ATSUSHI
Format Patent
LanguageEnglish
Published 18.10.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GAMMA RAY OR X-RAY MICROSCOPES
IRRADIATION DEVICES
NUCLEAR ENGINEERING
NUCLEAR PHYSICS
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
SEMICONDUCTOR DEVICES
TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR
X-RAY TECHNIQUE
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Summary:PROBLEM TO BE SOLVED: To improve conversion efficiency in generating extreme ultraviolet light.SOLUTION: A method for generating extreme ultraviolet light includes: a step (a) of supplying a target material into a chamber; and a step (b) of irradiating the target material with a laser beam to generate plasma, thereby generating extreme ultraviolet light. A spatial light intensity distribution of the laser beam may have a spatial light intensity distribution where a low-intensity region having light intensity lower than that at a position with a predetermined distance from the center of a beam axis exists within a range of the predetermined distance from the center of the beam axis.
Bibliography:Application Number: JP20110064053