SEMICONDUCTOR CARRIER LIFE MEASURING METHOD AND SEMICONDUCTOR CARRIER LIFE MEASURING APPARATUS USING THE SAME

• Main Authors: TAKAMOKU HIROYUKI, HAYASHI KAZUSHI, INUI MASAHIRO, SUMIE SHINGO
• Format: Patent
• Language: English
• Published: 11.10.2012
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

PROBLEM TO BE SOLVED: To provide a semiconductor carrier life measuring method and a semiconductor carrier life measuring apparatus capable of measuring the carrier life more accurately.SOLUTION: A first primary mode carrier life τis determined from the change of each measurement wave reflected in the first irradiation range of a semiconductor X surface when the first irradiation range is irradiated with first light Land second light Lhaving wavelengths different from each other, and a second primary mode carrier life τis determined from the change of each measurement wave reflected in the second irradiation range smaller than the first irradiation range when the second irradiation range is irradiated with the first light Land second light L. Based on the correlation of the first primary mode carrier life τand the second primary mode carrier life τdetermined at a specific position of the semiconductor X, the second primary mode carrier life τat each part of the semiconductor X is corrected thus determining the carrier life τof the semiconductor X.