PATTERN DEFECT DETECTION DEVICE

PROBLEM TO BE SOLVED: To provide a pattern defect detection device that detects a fluorescent image, a diffusion light image, and a reflection light image of a substrate formed by laminating dry films so as to easily detect various defects occurring in an exposure process.SOLUTION: The pattern defec...

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Bibliographic Details
Main Authors PARK JIN WON, PARK SU-WOON, KIM TEG-GYUM
Format Patent
LanguageEnglish
Published 04.10.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a pattern defect detection device that detects a fluorescent image, a diffusion light image, and a reflection light image of a substrate formed by laminating dry films so as to easily detect various defects occurring in an exposure process.SOLUTION: The pattern defect detection device includes a light source 11 for generating and emitting light, a scan mirror 14 for scanning a substrate 20 with the light emitted by the light source 11, a fluorescent light image detection unit 17 for detecting the image of fluorescent light emitted by the substrate 20, and a diffusion light image detection unit 19 for detecting the image of diffusion light diffused by the substrate 20.
Bibliography:Application Number: JP20110100599