METHOD AND DEVICE FOR DETECTING SUBSTRATE SURFACE PROPERTY

PROBLEM TO BE SOLVED: To provide a method and a device for detecting a substrate surface property to easily detect a bonding state of a compound provided on a substrate and including a silanol group, without destructing and without contacting the compound.SOLUTION: A method and a device for detectin...

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Bibliographic Details
Main Authors TANIGUCHI ATSUSHI, YUI KOJI, YOSHINO NORIO, OSAKO SHINJI
Format Patent
LanguageEnglish
Published 27.09.2012
Subjects
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:PROBLEM TO BE SOLVED: To provide a method and a device for detecting a substrate surface property to easily detect a bonding state of a compound provided on a substrate and including a silanol group, without destructing and without contacting the compound.SOLUTION: A method and a device for detecting a substrate surface property, in which: either of parallel polarized light and vertical polarized light is selected to be incident on a compound-imparted surface of a substrate imparted with a compound including a silanol group; the parallel polarized light and the vertical polarized light are detected by using light emitted from the substrate; and a bonding state is detected of the compound existing on the substrate by isolating a peak of a structural portion in the compound imparted on the substrate, from a vibration spectrum obtained by spectrally analysing the detected polarized light respectively within a range of 100 cmto 1800 cm.
Bibliography:Application Number: JP20110048576