SEMICONDUCTOR DEVICE
PROBLEM TO BE SOLVED: To prevent variation in characteristics of a semiconductor device caused by stress propagation from an embedded electrode plug, and operation destabilization of the semiconductor device caused by electrical noise propagation from the embedded electrode plug.SOLUTION: A semicond...
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Main Author | |
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Format | Patent |
Language | English |
Published |
30.08.2012
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Subjects | |
Online Access | Get full text |
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