SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To prevent variation in characteristics of a semiconductor device caused by stress propagation from an embedded electrode plug, and operation destabilization of the semiconductor device caused by electrical noise propagation from the embedded electrode plug.SOLUTION: A semicond...

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Bibliographic Details
Main Author OYU KIYONORI
Format Patent
LanguageEnglish
Published 30.08.2012
Subjects
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