SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To prevent variation in characteristics of a semiconductor device caused by stress propagation from an embedded electrode plug, and operation destabilization of the semiconductor device caused by electrical noise propagation from the embedded electrode plug.SOLUTION: A semicond...

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Bibliographic Details
Main Author OYU KIYONORI
Format Patent
LanguageEnglish
Published 30.08.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To prevent variation in characteristics of a semiconductor device caused by stress propagation from an embedded electrode plug, and operation destabilization of the semiconductor device caused by electrical noise propagation from the embedded electrode plug.SOLUTION: A semiconductor device has: a semiconductor substrate; an element formation region having a semiconductor element formed on the semiconductor substrate; one or more embedded electrode plugs provided so as to penetrate through the semiconductor substrate; and a groove-type electrode embedded in a trench located in the semiconductor substrate between the element formation region and the embedded electrode plug.
Bibliography:Application Number: JP20110021805