LITHIUM-CONTAINING TRANSITION METAL OXIDE TARGET AND METHOD FOR PRODUCING THE SAME, AND LITHIUM ION THIN-FILM SECONDARY BATTERY

• Main Authors: NAGASE RYUICHI, KAJITANI YOSHIO
• Format: Patent
• Language: English
• Published: 30.08.2012
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; INORGANIC CHEMISTRY; METALLURGY; PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To provide: a lithium-containing transition metal oxide target for forming a thin-film positive electrode for use in a thin-film battery, such as a totally solid battery; a method for producing the lithium-containing transition metal oxide target; and a lithium ion thin-film secondary battery.SOLUTION: A lithium-containing transition metal oxide target comprises a sintered body of lithium-containing transition metal oxide whose crystal system is a hexagonal system, while the sintered body has a relative density of 90% or higher and an average crystal grain size of 1 μm or longer and 50 μm or shorter. A lithium-containing transition metal oxide target comprises a sintered body of lithium-containing transition metal oxide whose crystal system is a hexagonal system, while intensity ratios of the (003) face, the (101) face and the (104) face obtained by X-ray diffractometry using CuKα rays satisfy the following conditions (1) and (2). (1) The peak ratio of the (101) face to the (003) face is in the range of 0.4 or higher and 1.1 or lower. (2) The peak ratio of the (101) face to the (104) face is 1.0 or higher.