COATING APPARATUS

• Main Authors: OZAKI FUMIYOSHI, MURAI NOBUHIKO
• Format: Patent
• Language: English
• Published: 09.08.2012
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; PERFORMING OPERATIONS; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a coating apparatus which prevents a nozzle from colliding with a substrate and can carry out stable coating without causing film breakage on a coating film, even for the substrate having large thickness unevenness.SOLUTION: A substrate surface measuring part 30 previously acquires height information in each measuring set position by measuring the height of each measuring set position in the coating region of the substrate W before the coating operation is carried out. A discharge part height control part 20 controls the height of the nozzle 11 before the coating operation is carried out so that the nozzle 11 is positioned in a place higher than the highest point of the substrate W by a prescribed distance on the basis of the height information of each measuring set position. A discharge part 10 carries out the coating operation while relatively moving in the horizontal direction with respect to the substrate W. A discharge quantity control part 40 carries out coating, while controlling the discharge quantity of a coating liquid to be discharged to each position in the coating region from the discharge part 10 according to the distance between the discharge part 10 and the substrate W during the coating operation.