PLASMA GENERATING APPARATUS IN LIQUID, PLASMA PROCESSING APPARATUS IN LIQUID, PLASMA GENERATING METHOD IN LIQUID, AND PLASMA PROCESSING METHOD IN LIQUID

• Main Authors: IVAN PETROV GANASHEV, SUGAI HIDEO
• Format: Patent
• Language: English
• Published: 26.07.2012
• Subjects: CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; THEIR RELEVANT APPARATUS; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a plasma generating apparatus in the liquid, a plasma processing apparatus in the liquid, a plasma generating method in the liquid, and a plasma processing method in the liquid in which metallic contamination of the liquid is suppressed.SOLUTION: The plasma generating apparatus in the liquid comprises a liquid supply section which supplies liquid, a microwave generating section which generates microwaves, a pressure reducing section which generates bubbles or facilitates generation of bubbles by increasing the flow velocity of the liquid thereby reducing the pressure of the liquid, and a resonance section which resonates the microwaves and radiates the resonated microwaves to the pressure reducing section. The liquid and the resonance section are isolated by the pressure reducing section.