METHOD AND APPARATUS FOR SELECTIVELY COLLECTING PROCESSING EXHAUST

PROBLEM TO BE SOLVED: To provide a method and an apparatus for recovering desired gases such as xenon difluoride, xenon, argon, helium or neon from exhausts of a chemical processing reactor.SOLUTION: This apparatus comprises a chemical processing reactor 10 with one or more lines for introducing two...

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Main Authors EUGENE JOSEPH KAWRACKI JR, MATTHEW JOHN BOSCO, GERALD W KLEIN, RICHARD LINTON SAMSAL, DAVID CHARLES WINCHESTER, ISAK PATRICK WEST, DEE DOUGLAS PAUL, JOHNSON ANDREW DAVID
Format Patent
LanguageEnglish
Published 28.06.2012
Subjects
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOUNDS THEREOF
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INORGANIC CHEMISTRY
METALLURGY
NON-METALLIC ELEMENTS
PERFORMING OPERATIONS
PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
SEMICONDUCTOR DEVICES
SEPARATION
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a method and an apparatus for recovering desired gases such as xenon difluoride, xenon, argon, helium or neon from exhausts of a chemical processing reactor.SOLUTION: This apparatus comprises a chemical processing reactor 10 with one or more lines for introducing two or more kinds of separate gas compositions; at least one inflow entrance 11 for introducing the separate gas compositions; an exhaust line 18 from the chemical processing reactor; a check valve 20 in the exhaust line; a recovery line 24, in which the desired gases can be picked up from the exhaust line; an automatic valve 26 in the recovery line; a processing controller 104; and a compressor 28 in the recovery line. The processing controller introduces the gas compositions, operates the automatic valve in the recovery line, and thereby controls the automatic valve to be opened at least partially while the desired gases exist in the exhaust line.
Bibliography:Application Number: JP20110015633