LASER GAS ANALYZER

PROBLEM TO BE SOLVED: To materialize a laser gas analyzer capable of always keeping an optical axis constant, and carrying out stable measurement, even if thermal deformation and the like occurs in a process operating state.SOLUTION: A laser gas analyzer emits a laser beam 15 into measured gas 1, an...

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Main Authors NANKO TOMOAKI, AKUTSU YUKITSUGU, TAMURA KAZUTO, FUKUNAGA YASUSHI, TAKAMATSU YUKIHIKO
Format Patent
LanguageEnglish
Published 07.06.2012
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Summary:PROBLEM TO BE SOLVED: To materialize a laser gas analyzer capable of always keeping an optical axis constant, and carrying out stable measurement, even if thermal deformation and the like occurs in a process operating state.SOLUTION: A laser gas analyzer emits a laser beam 15 into measured gas 1, and measures gas concentration from light quantity change due to the optical absorption of the laser beam 15. The laser gas analyzer comprises a lens 12 for changing the laser beam 15 emitted from a laser 11 to parallel light, a detector for detecting light quantity after the laser beam 15 emitted from the lens 12 passes through the measured gas 1, an actuator 13 for moving the laser 11 within a moving plane at a focus position of the lens 12, and an actuator control portion 16 for driving the actuator 13 on the basis of a signal from the detector.
Bibliography:Application Number: JP20100257449