METHOD OF MANUFACTURING TOUCH SENSOR PATTERN AND SIGNAL CONDUCTOR

• Main Authors: YANG KAI TI, CHANG CHIHN, LIU CHIH-YUNG, YANG JENN-NING
• Format: Patent
• Language: English
• Published: 31.05.2012
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC SWITCHES; ELECTRICITY; EMERGENCY PROTECTIVE DEVICES; PHYSICS; RELAYS; SELECTORS

PROBLEM TO BE SOLVED: To provide a method of manufacturing a touch sensor pattern and a signal conductor.SOLUTION: The method of manufacturing the touch sensor pattern and signal conductor provide a substrate with high transmittancy which has at least a first conductive plating film and a second conductive plating film formed on a surface. Then a predetermined pattern having a detection region and a wiring region is formed by forming a plurality of insulating groove lines by irradiating the first conductive plating film and second conductive plating film with a high-energy beam. Successively, a surface of the conductive plating film in the wiring region is covered with one layer of a resist thin film by carrying out a lithography process on the substrate. Then the first conductive plating film in the detection area is removed by performing an etching process on the substrate. Consequently, a predetermined pattern having the second conductive plating film is formed in the detection region of the substrate, and a predetermined pattern having the first conductive plating film and second conductive plating film is formed in the wiring region. Among them, the high energy beam should be an ultrashort pulse gaussian beam.