PROBE UNIT AND CHECKUP APPARATUS

• Main Authors: MIURA KAZUYOSHI, OSANAI YASUAKI
• Format: Patent
• Language: English
• Published: 26.04.2012
• Subjects: DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING; FREQUENCY-CHANGING; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; NON-LINEAR OPTICS; OPTICAL ANALOGUE/DIGITAL CONVERTERS; OPTICAL LOGIC ELEMENTS; OPTICS; PHYSICS; TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF; TESTING

PROBLEM TO BE SOLVED: To maintain high accuracy of contact between each contact piece of a film type probe and each electrode of a checkup object.SOLUTION: In a state in which each contact piece is provided at the tip of a film type probe, the tip extends out from a probe block, and is freely flexible, the film type probe is supported by the probe block, and a pressing mechanism has a pressing face that comes into contact with the tip of the film type probe. In a state in which the pressing face overlooks the tip of the film type probe, the pressing mechanism is so oscillably supported by the probe block that the pressing face moves toward and away from each of the electrodes of a checkup object in an arciform locus in a direction orthogonal to the direction along the electrodes arrayed in parallel, and has a gap between the pressing face and the film type probe side of the pressing mechanism.