ION SOURCE EMITTER

PROBLEM TO BE SOLVED: To provide an ion source emitter which has a minute projection made of a noble metal and does not require much time for restart in a device even when stored for a long period of time after exposure to the atmosphere.SOLUTION: A noble metal layer 11 coats an outer periphery of a...

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Bibliographic Details
Main Authors MORIYA HIRONORI, KAGA HIROYASU
Format Patent
LanguageEnglish
Published 19.04.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Summary:PROBLEM TO BE SOLVED: To provide an ion source emitter which has a minute projection made of a noble metal and does not require much time for restart in a device even when stored for a long period of time after exposure to the atmosphere.SOLUTION: A noble metal layer 11 coats an outer periphery of a base part 10 made of a single crystal metal. A minute projection 13 is made of the same noble metal as the noble metal layer 11 and is formed at a front end of the base part 10. An additional coating layer 14 is formed so as to coat the minute projection 13 and the noble metal layer 11 and is made of the same noble metal as the noble metal layer 11.
Bibliography:Application Number: JP20100225086