DISCHARGER

PROBLEM TO BE SOLVED: To provide a discharger capable of preventing troubles due to dropping of deposits, such as discharge products and scattered materials, onto a surface of a processing object.SOLUTION: A discharger 2 for discharging a processing object 1 located below to electrify or remove elec...

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Bibliographic Details
Main Author UNO MASAMI
Format Patent
LanguageEnglish
Published 19.04.2012
Subjects
CINEMATOGRAPHY
ELECTROGRAPHY
ELECTROPHOTOGRAPHY
HOLOGRAPHY
MAGNETOGRAPHY
PHOTOGRAPHY
PHYSICS
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Summary:PROBLEM TO BE SOLVED: To provide a discharger capable of preventing troubles due to dropping of deposits, such as discharge products and scattered materials, onto a surface of a processing object.SOLUTION: A discharger 2 for discharging a processing object 1 located below to electrify or remove electricity from a surface of the processing object is configured to include: a discharge electrode 10 having an axial line; a shield 12 which has an inner surface 12b1 facing the discharge electrode 10 and an opposite outer surface 12b2 and includes a side plate 12b extending approximately in parallel with the axial line; a grid electrode 11 disposed between the discharge electrode 10 and the surface of the processing object; and a dropping object reception part 30 of planar shape which is disposed between the side plate 12b and the surface of the processing object 1 and is continuous from the inner surface 12b1 side to the outer surface 12b2 side of the side plate 12b in a direction approximately orthogonal to the axial line.
Bibliography:Application Number: JP20100225184