MANUFACTURING METHOD OF SOLID-STATE IMAGE PICKUP DEVICE, SOLID-STATE IMAGE PICKUP DEVICE, AND ELECTRONIC EQUIPMENT

PROBLEM TO BE SOLVED: To provide a manufacturing method of a solid-state image pickup device which can enlarge the occupied area of an optical filter to enhance the light reception amount at a photoelectric conversion part despite the provision of a color mixture prevention film between the optical...

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Bibliographic Details
Main Authors ITO TOMOMI, SUZUKI RYOJI, NATORI TAICHI
Format Patent
LanguageEnglish
Published 12.04.2012
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PICTORIAL COMMUNICATION, e.g. TELEVISION
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a manufacturing method of a solid-state image pickup device which can enlarge the occupied area of an optical filter to enhance the light reception amount at a photoelectric conversion part despite the provision of a color mixture prevention film between the optical filters for different colors disposed above the photoelectric conversion part.SOLUTION: A first island-shaped pattern independent as each of color filters R, B, and G is formed on some of a plurality of photoelectric conversion parts 21 arrayed on the surface side of a substrate 11. In addition, a color mixture prevention film 31 is formed on the side wall of the first pattern. After that, a second island-shaped pattern independent as a white filter W is formed on the remaining ones of the plurality of photoelectric conversion parts 21 so as to sandwich the color mixture prevention film 31 between the first and second patterns.
Bibliography:Application Number: JP20100217861