POLISHING APPARATUS

• Main Authors: MURATA TADASHI, ONISHI KEN, MORII KYOKO
• Format: Patent
• Language: English
• Published: 08.03.2012
• Subjects: COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GRINDING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; METAL-WORKING NOT OTHERWISE PROVIDED FOR; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PERFORMING OPERATIONS; PHYSICS; POLISHING; REGULATING; TRANSPORTING

PROBLEM TO BE SOLVED: To allow the size and cost of a polishing apparatus to be reduced, and to prevent a shock caused by control switching from occurring.SOLUTION: A rotation speed deviation calculating part 230 calculates a rotation speed deviation by subtracting the rotation speed of a polishing tool 11 from a target rotation speed. A control correction amount calculating part 240 calculates a control correction amount for integral control of force application onto the polishing tool 11 of a travel driving part 15 on the basis of the rotation speed deviation. A general target position calculating part 320 calculates a general target position by subtracting a control correction amount from a target position. A general position deviation calculating part 330 calculates a general position deviation by subtracting an actual position from the general target position. A position control part 340 calculates a control command value for PID control on the basis of the general position deviation, and outputs it to the travel driving part 15.