ATMOSPHERIC PRESSURE PLASMA JET APPARATUS

PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma jet apparatus that processes a material of large lateral width in a short time at low cost.SOLUTION: The atmospheric pressure plasma jet apparatus includes atmospheric pressure plasma jet generation means 3 for generating an atmospheric...

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Bibliographic Details
Main Authors OSHIMA NOBUAKI, HARA TAMIO
Format Patent
LanguageEnglish
Published 23.02.2012
Subjects
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PLASMA TECHNIQUE
PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS
PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS
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Summary:PROBLEM TO BE SOLVED: To provide an atmospheric pressure plasma jet apparatus that processes a material of large lateral width in a short time at low cost.SOLUTION: The atmospheric pressure plasma jet apparatus includes atmospheric pressure plasma jet generation means 3 for generating an atmospheric pressure plasma jet using a material gas consisting of a single gaseous species or two or more gaseous species which are unlikely to chemically react with each other in plasma, and a nozzle 5 which jets plasma plumes of the atmospheric pressure plasma jet, the nozzle 5 including an exit-side opening 25 which is sectioned in a thin and long slit shape, and also internally having a diffusion member 29 which spreads the plasma plumes in a length direction of the slit shape.
Bibliography:Application Number: JP20100175611