METHOD OF DEPOSITING PIEZOELECTRIC FILM AND PIEZOELECTRIC ELEMENT USING IT

• Main Author: MURASHIMA YUJI
• Format: Patent
• Language: English
• Published: 05.01.2012
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

PROBLEM TO BE SOLVED: To enhance the characteristics and reliability of an element using a piezoelectric substance.SOLUTION: A space where a pair of targets are facing each other is provided in a vacuum chamber, a substrate and a lead supply source are installed substantially perpendicularly to the...