SUCTION MEMBER AND METHOD OF MANUFACTURING THE SAME

• Main Author: INAGAKI TAKEHIRO
• Format: Patent
• Language: English
• Published: 22.12.2011
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To obtain a suction member consisting of porous ceramic and used in a vacuum suction device having a loading surface of high surface accuracy and producing a sufficient suction force with low pressure loss, and to provide a method of manufacturing the same.SOLUTION: Since aggregate forming a skeleton of porous ceramic is produced by mixing a plurality of kinds of ceramic powder having different average grain sizes, and a shaking step for shaking slurry cast in a casting step and making a structure having such a particle size distribution as the average grain size increases from the undersurface toward the top face is provided, a suction member 11 having a pore structure where average pore diameter and porosity increase from a loading surface 11a toward a suction surface 11b can be manufactured. Consequently, surface accuracy of the loading surface 11a can be improved, and sufficient suction force can be maintained by reducing pressure loss in vacuum suction from the suction surface 11b.