CLUSTER BEAM GENERATOR, SUBSTRATE PROCESSING APPARATUS, CLUSTER BEAM GENERATION METHOD AND SUBSTRATE PROCESSING METHOD

PROBLEM TO BE SOLVED: To provide a cluster beam synthesizer which can control the ratio of a cluster of liquid material and a cluster of gas material easily.SOLUTION: A cluster beam generator 10 generating a cluster beam 26 comprises a mixer 40 which mixes a gas material and a liquid material, a noz...

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Bibliographic Details
Main Authors YAMADA AKIRA, TOYODA NORIAKI, NARISHIMA MASAKI
Format Patent
LanguageEnglish
Published 08.12.2011
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:PROBLEM TO BE SOLVED: To provide a cluster beam synthesizer which can control the ratio of a cluster of liquid material and a cluster of gas material easily.SOLUTION: A cluster beam generator 10 generating a cluster beam 26 comprises a mixer 40 which mixes a gas material and a liquid material, a nozzle 21 which supplies the gas material and the liquid material mixed in the mixer 40 as a cluster, and a temperature control unit 23 which controls temperature of the nozzle 21. When the temperature control unit 23 changes temperature of the nozzle, the ratio of a cluster of the liquid material and a cluster of the gas material in the cluster is adjusted.
Bibliography:Application Number: JP20100120919