SUBSTRATE CONVEYANCE DEVICE

PROBLEM TO BE SOLVED: To provide a substrate conveyance device capable of conveying a substrate avoiding contact with the substrate when floating and conveying the substrate.SOLUTION: The substrate conveyance device includes: a contact member 4 having a surface contacting with a part of a lower surf...

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Bibliographic Details
Main Author FUJISAKI NOBUO
Format Patent
LanguageEnglish
Published 08.12.2011
Subjects
BASIC ELECTRIC ELEMENTS
CONVEYING
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HANDLING THIN OR FILAMENTARY MATERIAL
PACKING
PERFORMING OPERATIONS
PNEUMATIC TUBE CONVEYORS
SEMICONDUCTOR DEVICES
SHOP CONVEYOR SYSTEMS
STORING
TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING
TRANSPORTING
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Summary:PROBLEM TO BE SOLVED: To provide a substrate conveyance device capable of conveying a substrate avoiding contact with the substrate when floating and conveying the substrate.SOLUTION: The substrate conveyance device includes: a contact member 4 having a surface contacting with a part of a lower surface of the substrate G floating above a floating plate 2; and a guide 5 extending along the conveyance direction of the substrate G by a conveying part 3, arranging the surface that the contact member 4 in a position higher than a top surface of the floating plate 2 and also a position to come into contact with the lower surface of the substrate G floating above the floating plate 2, and guiding the movement of the contact member 4 while keeping the contact between the substrate G and the contact member 4.
Bibliography:Application Number: JP20100118720