ELECTROSTATIC CHUCK

• Main Authors: SAWAMURA TAKENORI, INUI YASUHIKO, ITO YOICHI
• Format: Patent
• Language: English
• Published: 01.12.2011
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; TRANSPORTING

PROBLEM TO BE SOLVED: To provide an electrostatic chuck which can prevent cavity generation, high resistance, and generation of electrical disconduction inside a conductive layer, which can improve bond strength, and which can improve long-term reliability of the whole device.SOLUTION: An electrostatic chuck 1A device comprises: a plate substrate 2A made of ceramic which has yttria as its main ingredient; a concavity 3A which opens on one principal surface of this substrate; a conductive layer 4A exposed to the bottom surface 9A of the concavity and made of platinum and ceramic which has yttria as its main ingredient; an electrode terminal 5A positioned to stand in the concavity and connected electrically to the conductive layer; a connection intermediate layer 6A formed between the surface 10A of the conductive layer and the electrode terminal and containing no less than 93 volume % of platinum.