TREATMENT LIQUID PURIFICATION DEVICE

• Main Author: NAKAYA TAKESHI
• Format: Patent
• Language: English
• Published: 01.12.2011
• Subjects: COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEPARATION; TRANSPORTING

PROBLEM TO BE SOLVED: To provide a treatment liquid purification device capable of efficiently collecting not only a deposited foreign matter but also a floating foreign matter from a treatment liquid collected in a treatment liquid tank by a simpler and more reasonable configuration.SOLUTION: This treatment liquid purification device includes the treatment liquid tank 2, includes a hopper 6 guiding the collection treatment liquid collected from a treatment liquid supplied part 1 into the treatment liquid tank 2, includes a solid-liquid separator 3 performing the solid-liquid separation of the treatment liquid, includes a pump 40 sucking the foreign matter deposited in the bottom of the treatment liquid tank 2 from a treatment liquid collection port formed in a deep part of the treatment liquid tank together with the treatment liquid and carrying them to the solid-liquid separator 3, and includes a supply part 4 for supplying the treatment liquid applied with the solid-liquid separation to the treatment liquid supplied part 1. The treatment liquid tank 2 is provided with a circulation mechanism F horizontally circulating the treatment liquid in the treatment liquid tank 2, and has a guide G guiding the treatment liquid circulating in the treatment liquid tank 2 to the deep part from a shallow part closer to a liquid surface than the deep part.